Playing a product video of:

UT-VDW3000HS Series

200〜300mm Double Arms

High-speed, low-vibration double-arm vacuum robot
that contributes to significant
equipment throughput improvements with
the world's fastest high-speed transfer in vacuum


  • Realizes the world's fastest high-speed transfer (650WPH) in vacuum.
  • Equipped with direct drive motors to significantly reduce vibration during arm operation.
  • Improves trajectory accuracy and positioning accuracy with the adoption of steel belts at the arm section.
  • Prevents wafer slippage during transfer with the adoption of high-friction pads on the hands.
  • Equipped with wafer center misalignment correction function.

Wafer slip prevention



Model UT-VDW3000HS series
Robot Type 4 axis Cylindrical Coordinate
Operation Range X1, X2-axis 620mm
θ-axis 346°
Z-axis 50mm
Max. Operation Speed X1, X2-axis 380°/sec.
θ-axis 300°/sec.
Z-axis 185mm/sec.
Operating Time X1, X2-axis 0.6sec./620mm
θ-axis 0.7sec./90°
Z-axis 0.25sec./20mm
Repeatability XYZ direction: ±0.1mm each (3σ) (※2)
Payload 2kg (※3)
Cleanliness ISO Class 1
Mass 160kg
Environment Temperature 5-40°C (main body)/5-80°C (arm)
Humidity 20-70%, No condensation
Pressure Atmospheric pressure ~ 10-6Pa

※1 Transfer performance differs from the standard when options are added.
※2 Under our evaluation conditions
※3 Total mass of hand base, hand, and wafer


Page top