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Advantages of introducing clean transfer robot ACTRANS
UT-VDX3000NS Series
High-precision,
single-arm vacuum robot equipped
with direct drive motors
to
significantly reduce vibration
Features
- Equipped with direct drive motors to significantly reduce vibration during arm operation.
- Compatible with ultra-high vacuum environments with adoption of partition wall type vacuum seal.
- Contributes to equipment throughput improvements with endless rotation axis specification.
- Contributes to equipment miniaturization with built-in controller.
- Equipped with wafer center misalignment correction function.
Realizes high-precision wafer transfer to destinations. Achieves φ0.02mm (3σ) or less.
Advantages of introducing clean transfer robot ACTRANS
Specifications*1
| Model | UT-VDX3000NS | |
|---|---|---|
| Category | Standard Type | |
| Robot type | 2-axis cylindrical coordinate type | |
| Operating range | X-axis | 850mm |
| θ-axis | Endless | |
| Z-axis | - | |
| Operating time | X-axis | 2.0sec. / 850mm |
| θ-axis | 2.5sec. / 180° | |
| Z-axis | - | |
| Repeatability | XY direction | φ0.02mm(3σ) (※2) |
| Z direction | - | |
| Payload | 1.0kg (※3) | |
| Cleanliness | ISO Class 1 | |
| Mass | 29kg | |
| Environment | Temperature | 5-40°C (main body)/5-80°C (arm) |
| Humidity | 20-70%, No condensation | |
| Pressure | Atmospheric pressure ～ 10-7Pa | |
※1
Transfer performance differs from the standard when options are added.
※2 Under our evaluation conditions
※3 Total mass of hand base, hand, and wafer
Q&A - Frequently Asked Questions -
Other Clean Transfer Robots
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Cylindrical coordinate type high-payload UT-VFX4000NM
Cylindrical coordinate type high heat-resistance UTVW-R2800H
Cylindrical coordinate type high-precision, low-vibration UT-VDX3000NS
Cylindrical coordinate type high-speed, low-vibration UT-VDW3000HS
SCARA type high-precision, low-vibration UT-VSW3000NS
