UT-AFX/W3000NM
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UT-AFX/W3000NM UT-AFX/W3000NM

UT-AFX/W3000NM Series

〜300mm Single Arm Double Arms Vacuum

Standard model for wafers up to 300mm
Standard robot with a built-in
servo amplifier and reduced wiring

Features

Wiring design using the high-speed power line communication technology significantly reduces wiring in the robot body as well as the number of external distribution cables and improves reliability compared with conventional robots.

従来機との比較図 従来機との比較図

Reduced operating time compared with conventional robot*1

X1, X2-axis 1.2sec. 1.0sec.
θ-axis 2.5sec. 2.2sec.
Z-axis 1.7sec. 1.5sec.

*1. UTW-RD5700

Lineup with various options

オプション

Specifications*1

Model UT-AFX3000NM UT-AFW3000NM
Robot Type 3-axis Cylindrical Coordinate 4-axis Cylindrical Coordinate
Operation Range X1, X2-axis 500mm
θ-axis 340°
Z-axis 300mm or 450mm
Max. Operation Speed X1, X2-axis 1000mm/sec.
θ-axis 200°/sec.
Z-axis 250mm/sec.
Operating Time X1, X2-axis 1.0sec./500mm
θ-axis 2.2sec./340°
Z-axis 1.5sec./300mm, 2.1sec./450mm
Repeatability XYZ direction ±0.1mm each
Payload 1.0kg/arm (Including E/E)
クリーン度 ISO Class 1 (ISO-14644)
Mass 30kg 32kg
Utilities Vacuum (for suction) -80kPaG or less, 10NL/min
Vacuum (for exhausting) -80kPaG or less, 10NL/min
Power supply Single-phase 200-230±10% VAC, 50/60Hz, 5A
Environment Temperature 5-45℃
Humidity 20-70% (no condensation)

*1. Transfer performance differs from the standard when options are added.

UT-AFW300NM
図面1
UT-AFW3001NM
図面2

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