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Advantages of introducing clean transfer robot ACTRANS
UT-AFX/W3000NM Series
Standard model for wafers up to 300mm
Standard robot with a built-in
servo amplifier and reduced wiring
Features
Wiring design using the high-speed power line communication technology significantly reduces wiring in the robot body as well as the number of external distribution cables and improves reliability compared with conventional robots.
Reduced operating time compared with conventional robot*1
| X1, X2-axis | 1.2sec. 1.0sec. |
|---|---|
| θ-axis | 2.5sec. 2.2sec. |
| Z-axis | 1.7sec. 1.5sec. |
*1. UTW-RD5700
Lineup with various options
Advantages of introducing clean transfer robot ACTRANS
Specifications*1
| Model | UT-AFX3000NM | UT-AFW3000NM | |
|---|---|---|---|
| Robot Type | 3-axis Cylindrical Coordinate | 4-axis Cylindrical Coordinate | |
| Operation Range | X1, X2-axis | 500mm | |
| θ-axis | 340° | ||
| Z-axis | 300mm or 450mm | ||
| Max. Operation Speed | X1, X2-axis | 1000mm/sec. | |
| θ-axis | 200°/sec. | ||
| Z-axis | 250mm/sec. | ||
| Operating Time | X1, X2-axis | 1.0sec./500mm | |
| θ-axis | 2.2sec./340° | ||
| Z-axis | 1.5sec./300mm, 2.1sec./450mm | ||
| Repeatability | XYZ direction ±0.1mm each | ||
| Payload | 1.0kg/arm (Including E/E) | ||
| クリーン度 | ISO Class 1 (ISO-14644) | ||
| Mass | 30kg | 32kg | |
| Utilities | Vacuum (for suction) | -80kPaG or less, 10NL/min | |
| Vacuum (for exhausting) | -80kPaG or less, 10NL/min | ||
| Power supply | Single-phase 200-230±10% VAC, 50/60Hz, 5A | ||
| Environment | Temperature | 5-45℃ | |
| Humidity | 20-70% (no condensation) | ||
＊1. Transfer performance differs from the standard when options are added.
Q&A - Frequently Asked Questions -
Other Clean Transfer Robots
Vacuum Robots
Cylindrical coordinate type standard UT-VFX3000NM
Cylindrical coordinate type high-payload UT-VFX4000NM
Cylindrical coordinate type high heat-resistance UTVW-R2800H
Cylindrical coordinate type high-precision, low-vibration UT-VDX3000NS
Cylindrical coordinate type high-speed, low-vibration UT-VDW3000HS
SCARA type high-precision, low-vibration UT-VSW3000NS
