Wafer transfer robot "ACTRANS" series
The concept of "state-of-the-art clean transport" contributes to improved productivity per unit area in semiconductor factories.
＞About the ACTRANS concept
High heat-resistance
High-payload
Standard
SCARA type,
high-precision
High-speed,
low-vibration
High-precision,
low-vibratoin
Standard
High-payload
High-speed
Without Y-axis
track 4-port
Special
drip-proof
Wafer-Aligners
Vertical Articulated
Vacuum Robots
Cylindrical coordinate type high heat-resistance
UTVW-R2800H
For wafers up to 300mm
High-precision, low-vibration double-arm vacuum robot for high-temperature
processes
Vacuum Robots
Cylindrical coordinate type high-payload
UT-VFX4000NM Series
High-payload, single-arm vacuum robot that can transfer heavy loads, such as masks, susceptors, and trays
Vacuum Robots
Cylindrical coordinate type standard UT-VFX3000NM
UT-VFX3000NM Series
Single-arm vacuum robot with selectable arm length and Z-axis
Vacuum Robots
SCARAarm type, high-precision
UT-VSW3000NS Series
Space-saving vacuum robot with SCARA arm and direct drive motor for high accuracy and low vibration
Vacuum Robots
Cylindrical coordinate type high-speed,low-vibration
UT-VDW3000HS Series
High-speed, low-vibration double-arm vacuum robot that contributes to significant equipment throughput improvements with the world’s fastest high-speed transfer in vacuum
Vacuum Robots
Cylindrical coordinate type high-precision,low-vibration
UT-VDX3000NS Series
High-precision, single-arm vacuum robot equipped with direct drive motors to significantly reduce vibration
Atmospheric Robots
Cylindrical coordinate type standard
UT-AFX/W3000NM Series
Standard model for wafers up to 300mm
Standard robot with a built-in servo amplifier and reduced wiring
Atmospheric Robots
Cylindrical coordinate type high-payload
UT-AFX/W4000NM Series
High-payload model for wafers up to 300mm
Standard robot capable of high-payload transfer and wide operating range
Atmospheric Robots
Cylindrical coordinate type high-speed
UTW-REH5500
High-speed model
High-speed transfer at 450WPH contributes to equipment throughput improvements
Atmospheric Robots
SCARA type without Y-axis track 4-port
UTM-R3700F
Wide operating range without Y-axis track Wide operating range articulated robot
Atmospheric Robots
Special drip-proof
UTX/W-RF5501RW
Drip-proof model for wafers up to 300mm
IP64-certified drip-proof robot
Wafer Aligners
OFH-4100 Series
For wafers from 50 to 300mm
Aligner compatible with high-speed alignment
EG-303 Series
For 300mm wafers
Edge grip type aligner never makes contact with wafer back sides
Atmospheric Robots
UT-AXW3000NS Series
Vertically articulated and 2-axis horizontal scalar motion minimizes transfer space in the EFEM
