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Advantages of introducing clean transfer robot ACTRANS
UT-AXW3000NS Series
Vertical articulated and two-axis
horizontal SCARA motion minimizes
EFEM transport space
Features
- Vertically articulated and 2-axis horizontal SCARA motion contributes to minimize transfer space in EFEM.
- Wafer gripping method can be either vacuum chuck or pneumatic edge clamp.
- Built-in aligner type will be released.
- Supports 3 to 5 ports with a wide range of vertical and horizontal access.
Advantages of introducing clean transfer robot ACTRANS
Specifications*1
| Model | UT-AXW3000NS | UT-AXW3001NS | |
|---|---|---|---|
| Robot type | 6 axis Vertical Articulated Type | ||
| Wafer Gripping Method | Vacuum check／Edge clamp | ||
| Operating range (※2) | X-axis | 550mm | |
| Y-axis | 2200mm | 2700mm | |
| Z-axis | 1186mm | 1436mm | |
| Max. Operating Speed | X-axis | 1500mm / sec | |
| Y-axis | 1500mm / sec | ||
| Z-axis | 1500mm / sec | ||
| Repeatability | XYZ direction: ±0.05 mm each (※3) | ||
| Payload | 1.0kg (※4) | ||
| Cleanliness | ISO Class 1 | ||
| Mass | Approx. 150 kg | Approx. 155 kg | |
| Environment | Temperature | 5-40°C | |
| Humidity | 20-70%, No condensation | ||
※1. Transfer perfomance differs from the standard when options are added.
※2. Some arm positions are restrictive.
※3. By in our evaluation condition.
※4. Including Hand-base, Hand and Wafer.
Q&A - Frequently Asked Questions -
Other Clean Transfer Robots
Vacuum Robots
Cylindrical coordinate type standard UT-VFX3000NM
Cylindrical coordinate type high-payload UT-VFX4000NM
Cylindrical coordinate type high heat-resistance UTVW-R2800H
Cylindrical coordinate type high-precision, low-vibration UT-VDX3000NS
Cylindrical coordinate type high-speed, low-vibration UT-VDW3000HS
SCARA type high-precision, low-vibration UT-VSW3000NS
