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Advantages of introducing clean transfer robot ACTRANS
UT-VDW3000HS Series
High-speed, low-vibration double-arm vacuum robot
that contributes to significant
equipment throughput improvements with
the world's fastest high-speed transfer in vacuum
Features
- Realizes the world's fastest high-speed transfer (650WPH) in vacuum.
- Equipped with direct drive motors to significantly reduce vibration during arm operation.
- Improves trajectory accuracy and positioning accuracy with the adoption of steel belts at the arm section.
- Prevents wafer slippage during transfer with the adoption of high-friction pads on the hands.
- Equipped with wafer center misalignment correction function.
Wafer slip prevention
Advantages of introducing clean transfer robot ACTRANS
Specifications*1
| Model | UT-VDW3000HS series | |
|---|---|---|
| Robot Type | 4 axis Cylindrical Coordinate | |
| Operation Range | X1, X2-axis | 620mm |
| θ-axis | 346° | |
| Z-axis | 50mm | |
| Max. Operation Speed | X1, X2-axis | 380°/sec. |
| θ-axis | 300°/sec. | |
| Z-axis | 185mm/sec. | |
| Operating Time | X1, X2-axis | 0.6sec./620mm |
| θ-axis | 0.7sec./90° | |
| Z-axis | 0.25sec./20mm | |
| Repeatability | XYZ direction: ±0.1mm each (3σ) (※2) | |
| Payload | 2kg (※3) | |
| Cleanliness | ISO Class 1 | |
| Mass | 160kg | |
| Environment | Temperature | 5-40°C (main body)/5-80°C (arm) |
| Humidity | 20-70%, No condensation | |
| Pressure | Atmospheric pressure ～ 10-6Pa | |
※1 Transfer performance differs from the standard when options are added.
※2 Under our evaluation conditions
※3 Total mass of hand base, hand, and wafer
Q&A - Frequently Asked Questions -
Other Clean Transfer Robots
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Cylindrical coordinate type high-precision, low-vibration UT-VDX3000NS
Cylindrical coordinate type high-speed, low-vibration UT-VDW3000HS
SCARA type high-precision, low-vibration UT-VSW3000NS
