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Advantages of introducing clean transfer robot ACTRANS
UT-VFX3000NM Series
For wafers up to 300mm
Single-arm vacuum robot
with selectable arm length and Z-axis
Features
- Compatible with two types of arm lengths as standard, and Z-axis can be selected for compatibility with various equipment layouts.
Advantages of introducing clean transfer robot ACTRANS
Specifications*1
| Model (※2) | UT-VFX3000NM | UT-VFX3010NM | |
|---|---|---|---|
| Category | Standard Type | Long Arm Type | |
| Robot Type | 2(3)-axis cylindrical coordinate type | ||
| Operation Range | X1, X2-axis | 510mm | 720mm |
| θ-axis | 340° | ||
| Z-axis (※2) | (20mm) | ||
|
Maximum operating speed Max. Operation Speed |
X1, X2-axis | 948mm/sec. | 1339mm/sec. |
| θ-axis | 200°/sec. | ||
| Z-axis (※2) | (121mm/sec.) | ||
|
Operation Time (theoretical value) (Calculated value) |
X1, X2-axis | 1.2sec./510mm | 1.2sec./720mm |
| θ-axis | 2.4sec./340° | ||
| Z-axis (※2) | (1.0sec./20mm) | ||
| Repeatability | XYZ direction ±0.1mm each | ||
| Payload | 0.7kg (including hand mass (E/E)) | ||
| Cleanliness | ISO Class 1 (ISO-14644) | ||
| Mass (※2) | 29kg (35kg) | ||
| Environment | Temperature |
10-40℃ (Atmosphere side) / 0-80℃ (Vacuum Seal Unit) |
|
| Humidity | 20-70%, No condensation | ||
| Pressure | Atmospheric pressure ～ 10-6Pa | ||
※1 Transfer performance differs from the standard when options are added.
※2 Values in parentheses indicate Z-axis mounting type.
Q&A - Frequently Asked Questions -
Other Clean Transfer Robots
Vacuum Robots
Cylindrical coordinate type standard UT-VFX3000NM
Cylindrical coordinate type high-payload UT-VFX4000NM
Cylindrical coordinate type high heat-resistance UTVW-R2800H
Cylindrical coordinate type high-precision, low-vibration UT-VDX3000NS
Cylindrical coordinate type high-speed, low-vibration UT-VDW3000HS
SCARA type high-precision, low-vibration UT-VSW3000NS
