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Advantages of introducing clean transfer robot ACTRANS
UT-VFX4000NM Series
For wafers up to 300mm
High-payload, single-arm vacuum robot
that can transfer heavy loads,
such as masks,
susceptors, and trays
Features
- Single arm type with Z-axis available
- Can transfer heavy loads, such as masks, susceptors, and trays.
Advantages of introducing clean transfer robot ACTRANS
Specifications*1
| Model | UT-VFX4000NM | UT-VFX4001NM | |
|---|---|---|---|
| Category | No Z-axis type | With Z-axis type | |
| Robot Type | 2 axis Cylindrical Coordinate | 3 axis Cylindrical Coordinate | |
|
Operation Range |
X-axis | 750mm | |
| θ-axis | 340° | ||
| Z-axis | - | 22mm | |
|
Max.Operation Speed |
X-axis | 62°/sec. | |
| θ-axis | 192°/sec. | ||
| Z-axis | - | 121mm/sec. | |
| Cycle Time | X-axis | 2.7sec. / 750mm | |
| θ-axis | 2.7sec. / 340° | ||
| Z-axis | - | 0.6sec. / 22mm | |
| Repeatability |
XYZ direction±0.1mm each(when
approaching θ-axis from one side) XYZ direction±0.2mm each(when approaching θ-axis from both sides) |
||
| Payload | 4kg (including hand mass (E/E)) | ||
| Cleanliness | ISO Class 1(ISO-14644) | ||
| Mass | 38kg | 44kg | |
| Environment | Temperature | 5-40℃(Atomosphere side)/0-80℃(Vacuum Seal Unit) | |
| Humidity | 70% or less, No condensation | ||
| Pressure | Atomospheric pressure ～ 10-6Pa | ||
※1 Transfer performance differs from the standard when options are added.
Q&A - Frequently Asked Questions -
Other Clean Transfer Robots
Vacuum Robots
Cylindrical coordinate type standard UT-VFX3000NM
Cylindrical coordinate type high-payload UT-VFX4000NM
Cylindrical coordinate type high heat-resistance UTVW-R2800H
Cylindrical coordinate type high-precision, low-vibration UT-VDX3000NS
Cylindrical coordinate type high-speed, low-vibration UT-VDW3000HS
SCARA type high-precision, low-vibration UT-VSW3000NS
