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Advantages of introducing clean transfer robot ACTRANS
UT-VSW3000NS Series
A vacuum robot that saves space
by mounting a SCARA arm and
achieves high precision and
low vibration with a direct drive motor.
Features
- Equipped with a SCARA arm, it is compatible with rectangular transfer modules, contributing to space saving.
- Double hand mounting for high speed wafer exchange.
- Equipped with a direct-drive motor for high-precision positioning and greatly reduced vibration during arm operation.
- Improved trajectory accuracy and positioning accuracy by using steel belts on the arms.
- Adoption of vacuum bulkhead seals instead of magnetic fluidic seals enables ultra-high vacuum and low outgassing.
Reduction of equipment installation area
by adopting SCARA arm
Currently, a cylindrical coordinate type robot is used in cluster formation that makes movements of the robot arm easy to understand, but the footprint of the vacuum equipment becomes larger due to circular transfer module. By changing cluster formation to square formation and using a SCARA arm type robot to transfer wafers, the footprint of the vacuum equipment can be reduced.
Advantages of introducing clean transfer robot ACTRANS
Specifications*1
| Model | UT-VSW3001NS | UT-VSW3002NS | |
|---|---|---|---|
| Robot type | 5 axis SCARA | ||
| Wafer Gripping Method | Friction gripping method | ||
| Operating range (※2) | W2-axis （Upper wrist axis） | 20-340° | |
| W2-axis （Upper wrist axis） | 20-340° | ||
| B-axis | 20-340° | ||
| A-axis | Endless | ||
| Z-axis | 50mm | 135mm | |
| Max. Operating Speed | W2-axis （Upper wrist axis） | 150° /sec | |
| W2-axis （Upper wrist axis） | 150° /sec | ||
| B-axis | Composite interpolation 950 mm/sec | ||
| A-axis | |||
| Z-axis | 32 mm/sec | ||
| Repeatability | XYZ direction: P-P 0.05 mm each (※3) | ||
| Payload | 1.0kg (※4) | ||
| Cleanliness | ISO Class 1 | ||
| Mass | Approx. 260 kg | Approx. 285 kg | |
| Environment | Temperature | 5-40 ℃ （Robot body） / 5-80 ℃（Arm） | |
| Humidity | 20-70%, No condensation | ||
| Pressure | Atomospheric pressure ～ 10-6 Pa | ||
| Controller | CFD19A2 | ||
※1. Transfer perfomance differs from the standard when options are added.
※2. Some arm positions are restrictive.
※3. By in our evaluation condition.
※4. Including Hand-base, Hand and Wafer.
Q&A - Frequently Asked Questions -
Other Clean Transfer Robots
Vacuum Robots
Cylindrical coordinate type standard UT-VFX3000NM
Cylindrical coordinate type high-payload UT-VFX4000NM
Cylindrical coordinate type high heat-resistance UTVW-R2800H
Cylindrical coordinate type high-precision, low-vibration UT-VDX3000NS
Cylindrical coordinate type high-speed, low-vibration UT-VDW3000HS
SCARA type high-precision, low-vibration UT-VSW3000NS
