UTM-R3700F

Wide operating range without
Y-axis track
Wide operating range articulated robot

Features

Access range as wide as 2.7m in the horizontal direction and 1.6m in the vertical direction without Y-axis track allows for compatibility with various equipment layouts.
Access four FOUPs with one robot. Access up to eight FOUPs.

Model		UTM-R3700F
Robot Type		6-axis articulated system
Operation Range	X1, X2-axis（Extension）	590mm
	θ-axis（Rotation）	332°
	Z-axis（Elevation）	310-703.8mm
	Y-axis（Slide）	±767.5mm
	A-axis（Correction of Y-axis tilt）	±2°
Max. Operation Speed	X1, X2-axis	1600mm/sec.
	θ-axis	540°/sec.
	Z-axis	1500mm/sec.
	Y-axis	1500mm/sec.
Operation Time	X1, X2-axis	0.9sec./590mm
	θ-axis	1.0sec./332°
	Z-axis	0.8sec./703.8mm
	Y-axis	1.4sec./1535mm
Repeatability		XθY directions（composite）: ±0.1mm, Z direction: ±0.1mm
Payload		0.5kg/arm（including Hand, Wafer）
Cleanliness	Edge Clamp E/E type	ISO Class 3（ISO-14644）
Cleanliness	Vacuum E/E type	ISO Class 1（ISO-14644）
Mass		74kg
Utilities	Edge Clamp E/E type	Air	0.3-0.7MpaG
	Vacuum E/E type	Vacuum	-80kPaG or less, 10NL/min.
	Vacuum (for exhausting)	-80kPaG or less, 40NL/min total
Environment	Temperature	0-40℃
Environment	Humidity	20-70%, No condensation

※1 Transfer performance differs from the standard when options are added.
※2 A wafer sensor/mapping sensor can be mounted optionally.