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Advantages of introducing clean transfer robot ACTRANS
UTX/W-RF5501RW
Drip-proof model for wafers up to 300mm
IP64-certified drip-proof robot
Features
- Can be used in processes where moisture is handled with realization of IP64.
- Capable of surface coating with special chemicals.
Advantages of introducing clean transfer robot ACTRANS
Specifications*1
| Model | UTX-RF5501RW | UTW-RF5501RW | |
|---|---|---|---|
| Robot Type | 3-axis Cylindrical Coordinate | 4-axis Cylindrical Coordinate | |
| Operation Range | X, A-axis | 500mm | |
| θ-axis | 340° | ||
| Z-axis | 300mm | ||
| R-axis | 180° | ||
| Max. Operation Speed | X1, X2-axis | 800mm/sec. | |
| θ-axis | 130°/sec. | ||
| Z-axis | 200mm/sec. | ||
| R-axis | 150°/sec. | ||
| Cycle Time | X1, X2-axis | 1.6sec./500mm | |
| θ-axis | 3.2sec./340° | ||
| Z-axis | 2.5sec./300mm | ||
| R-axis | 2.0sec./180° | ||
| Repeatability | XYZ direction ±0.1mm each | ||
| Payload | 1.5kg/arm (Including E/E, E/E base) | ||
| Cleanliness | ISO Class 4 (ISO-14644) | ||
| Mass | 32kg | 40kg | |
| Utilities | Clamp air | 0.25-0.3MPaG | |
| Internal pressure application and condensation prevention | 0.05MPaG | ||
| Power supply | 100-115±10％ VAC, 50/60Hz, 5A | ||
| Environment | Temperature | 0-40℃ | |
| Humidity | 20-70% (no condensation) | ||
※1 Transfer performance differs from the standard when options are added.
Q&A - Frequently Asked Questions -
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