3D-CAD data for standard robots is available. Please feel free to contact us by filling in the inquiry form.

The standard specifications, outline drawings, and 3D-CAD data of various robots are available.

Please feel free to contact us by filling in the inquiry form.

Our sales representative will contact you to confirm applicable mechanical specifications when incorporating into your equipment, such as:
- Can a rotatable space be secured?
- Are the transfer strokes accessible?
- Is the stroke in the vertical direction accessible?
- Is the robot speed specified to match the target equipment throughput?

Our extensive lineup of products includes the following specifications:
- Single-arm/double-arm
- Vacuum chuck/edge grip
- Cylindrical coordinate type stand-alone
- Cylindrical coordinate type with Y-axis track
- Vertical and horizontal SCARA
- Waterproof type

Yes. Standard types of end effectors (hands) are available for atmospheric robots and vacuum robots, but it is assumed that their shapes may change according to the wafer delivery stage of process equipment. Also, the material may be changed in response to a request for a heat-resistant specification. In that case, we can also handle separate design by replacing specifications separately.

- As for a single-arm type, long arm specifications and high-payload specifications are available in addition to standard specifications.
- As for a double-arm type, our lineup includes ultrahigh-precision specifications, high-temperature-capable specifications, and high-speed transfer specifications.

- Partition wall seals, magnetic fluid seals, and rubber seals are used depending on the model.

A robot controller for general industry actuates a robot arm by teaching and registering almost all desired operating positions and moving it along the positions in sequence in automatic operation mode. On the other hand, a robot controller for the semiconductor industry is designed to only teach a transfer position so that teaching positions in the middle of the transfer route are reduced to a minimum. In automatic operation mode, a robot arm is actuated by designating whether a wafer at the transfer position is removed from below or a wafer is placed on the transfer position from above using a GET or PUT command.
In the case of a robot controller for general industry, the operation route of the robot arm is determined by the thinking of the person who performs teaching (operator), while in the case of a robot controller for the semiconductor industry, the direction to approach one transfer position subject to teaching is switched according to the command.
A robot controller for the semiconductor industry is technology developed to simplify human teaching work.

Our wafer robots are compatible with the industry standards SEMI S2, S8, and F47, and comply with the UL Standards. Some models are prepared for self-certification for CE marking. Please feel free to contact us about details.

We are working on a content survey on their inclusion in parts, and upon request, we will issue a Certificate of Non-Use of RoHS10 Restricted Substances, submit chemSHERPA data, and make a response concerning non-applicability related to the TSCA, etc.

Successor models are available for some models.
Please feel free to contact us about details.

As connection methods, a LAN, RS-232C, parallel I/O, and CC-Link are available. Please feel free to contact us about more detailed specifications.

The dedicated software tool “On Desk” is available for some models.
We can lend out a notebook PC on which the software tool has been installed. You can use the notebook PC instead of a robot controller, and when a motion command is sent from higher-order equipment, the animation robot operates on the screen of the notebook PC, and when it reaches a target position, an operation completion notification is sent.

Yes.
Basically, it is controlled by the robot side controller, but it can also be controlled on the user's side by disclosing the wiring connected to the solenoid valve on a case-by-case basis.

On the clean transfer robot page of the DAIHEN website, a “list of discontinued models” is posted in PDF format, including repair periods. Repairs can be made if it is within the repair period and spare parts are in stock.

Our bases are located in the US, South Korea, China, and Taiwan.
- US (San Jose): sales base
- South Korea (Pyeongtaek): service base
- China (Changshu): production and service base
- Taiwan (Taipei): sales and service base

Repairs on wafer transfer robots are all made in Japan.
FPD robots installed in China, South Korea, and Taiwan are repaired/serviced as soon as they are returned to each base.
Please contact us because the situation changes over time.

It depends on the model and situation, but for wafer robots, personnel will be dispatched from Japan, while FPD robots will be supported by each base in South Korea, China, and Taiwan.
Please contact us because the situation changes over time.