The wafer transfer robot “UT-VDW3000” received
the “Japan Robot Association Award at the
Industrial Machine Design Awards IDEA.”
DAIHEN Corporation's wafer transfer robot “UT-VDW3000” for vacuum environment received
“Japan Robot Association Award” at the 52nd “Industrial Machine Design Awards IDEA”
sponsored by Nikkan Kogyo Shimbun, Ltd.
The award-winning “UT-VDW3000” received high acclaim for its achievement of realizing the world's fastest level of high-speed transfer under vacuum environments in semiconductor manufacturing processes and for its focused efforts on compatibility between design and performance.
■The Industrial Machine Design Awards IDEA:
Established by Nikkan Kogyo Shimbun, Ltd., in 1970 under the patronage of the Ministry of Economy, Trade and Industry and with support from the Japan Chamber of Commerce and Industry and industry associations for the purpose of promoting and developing industrial product designs in Japan. Selection is based on comprehensive evaluation from various perspectives including product function, performance, quality, operability, safety, maintainability, and economic efficiency, in addition to external design